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ISO 25178-603:2025 PDF
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Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| Edition | 2025 |
|---|---|
| Standard Part No | 603 |
| Published Date | 2025 |
| Published By | International Standardization Organisation |
| Page Count | 18 |
